A micromachined angular-acceleration sensor for geophysical applications

A micromachined angular-acceleration sensor for geophysical applications

A Novel Permanent Magnetic Angular Acceleration Sensor

Angular acceleration is an important parameter for status monitoring and fault diagnosis of rotary machinery. Therefore, we developed a novel permanent magnetic angular acceleration sensor, which is without rotation angle limitations and could directly measure the instantaneous angular acceleration of the rotating system. The sensor rotor only needs to be coaxially connected with the rotating s...

Low-Noise MEMS Vibration Sensor for Geophysical Applications

The need exists for high-sensitivity, low-noise vibration sensors for various applications, such as geophysical data collection, tracking vehicles, intrusion detectors, and underwater pressure gradient detection. In general, these sensors differ from classical accelerometers in that they require no direct current response, but must have a very low noise floor over a required bandwidth. Theory i...

Development of Mems Angular Rate Sensor for High-dynamics Applications

In this paper, presented are a design and test results of MEMS angular rate sensor of wide input range and wide bandwidth. Open loop performances of conventional MEMS rate sensor are very limited because of its nonlinear input-output relationship and very small bandwidth. In this study, a phase lead control scheme is applied to enlarge the operating range of the sensor. The structure of angular...

Bulk Micromachined Pressure Sensor

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.